JPH0518713Y2 - - Google Patents
Info
- Publication number
- JPH0518713Y2 JPH0518713Y2 JP16418886U JP16418886U JPH0518713Y2 JP H0518713 Y2 JPH0518713 Y2 JP H0518713Y2 JP 16418886 U JP16418886 U JP 16418886U JP 16418886 U JP16418886 U JP 16418886U JP H0518713 Y2 JPH0518713 Y2 JP H0518713Y2
- Authority
- JP
- Japan
- Prior art keywords
- screen
- viewing window
- chamber
- duct
- monitor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001514 detection method Methods 0.000 claims description 7
- 239000002245 particle Substances 0.000 claims description 7
- 238000012544 monitoring process Methods 0.000 claims description 5
- 238000007796 conventional method Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Particle Accelerators (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16418886U JPH0518713Y2 (en]) | 1986-10-28 | 1986-10-28 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16418886U JPH0518713Y2 (en]) | 1986-10-28 | 1986-10-28 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6370092U JPS6370092U (en]) | 1988-05-11 |
JPH0518713Y2 true JPH0518713Y2 (en]) | 1993-05-18 |
Family
ID=31093076
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16418886U Expired - Lifetime JPH0518713Y2 (en]) | 1986-10-28 | 1986-10-28 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0518713Y2 (en]) |
-
1986
- 1986-10-28 JP JP16418886U patent/JPH0518713Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPS6370092U (en]) | 1988-05-11 |
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